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- Applied Optics
- Vol. 55,
- Issue 9,
- pp. 2387-2392
- (2016)
- •https://doi.org/10.1364/AO.55.002387
Zhi-Gang Han, Lu Yin, Lei Chen, and Ri-Hong Zhu
Author Affiliations
Zhi-Gang Han,1,*Lu Yin,2Lei Chen,2and Ri-Hong Zhu1
1Key Laboratory of Advanced Solid-State Laser, Nanjing University of Science and Technology, Nanjing 210094, China
2School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing 210094, China
*Corresponding author: hannjust@163.com
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Zhi-Gang Han, Lu Yin, Lei Chen, and Ri-Hong Zhu, "Absolute flatness testing of skip-flat interferometry by matrix analysis in polar coordinates," Appl. Opt. 55, 2387-2392 (2016)
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Table of Contents Category
- Instrumentation, Measurement, and Metrology
Optics & Photonics Topics
The topics in this list come from the Optics and Photonics Topics applied to this article.
- CCD cameras
- Free electron lasers
- Interferometry
- Matrix methods
- Spatial frequency
- Zernike polynomials
History
- Original Manuscript: December 10, 2015
- Revised Manuscript: January 31, 2016
- Manuscript Accepted: February 2, 2016
- Published: March 18, 2016
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- Figures (9)
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Abstract
A new method utilizing matrix analysis in polar coordinates has been presented for absolute testing of skip-flat interferometry. The retrieval of the absolute profile mainly includes three steps: (1)transform the wavefront maps of the two cavity measurements into data in polar coordinates; (2)retrieve the profile of the reflective flat in polar coordinates by matrix analysis; and (3)transform the profile of the reflective flat back into data in Cartesian coordinates and retrieve the profile of the sample. Simulation of synthetic surface data has been provided, showing the capability of the approach to achieve an accuracy of the order of 0.01nm RMS. The absolute profile can be retrieved by a set of closed mathematical formulas without polynomial fitting of wavefront maps or the iterative evaluation of an error function, making the new method more efficient for absolute testing.
© 2016 Optical Society of America
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Equations (24)
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